Protecting MEMS Pressure Sensors with Parylene

Welcome to All Sensors “Put the Pressure on Us” blog. This blog brings out pressure sensor aspects in a variety of applications inspired by headlines, consumer and industry requirements, market research, government activities, and you.

Protecting MEMS Pressure Sensors with Parylene

Microelectromechanical systems (MEMS) pressure sensors provide accurate measurements for many applications. However, the top side of the piezoresistive MEMS pressure sensor die that has the sensing elements and potentially other circuitry cannot survive exposure to many common items that need to have their pressure measured — including water. To isolate the top surface of the pressure sensor die and other exposed circuitry, parylene is often used as a protective coating. Applied by a vapor deposition polymerization process, the parylene allows pressure to be transmitted to the top side of the pressure sensor to make measurements without damaging or impacting the reliability of the circuitry. The conformal, thin-film coating provides a moisture, chemical and dielectric barrier to protect the sensor’s critical circuitry in medical, automotive and other applications.

In fact, parylene extends the applications that a specific sensor design can address and is part of the packaging expertise that a sensor company may provide. Parylene coating can be found on a wide variety of All Sensors’ products. Specifically, parylene coating is available in all miniature digital product families such as the miniature digital DLVR, DLHR and DLLR Series as well as the millivolt output MLV series and the miniature digital and analog ELVR series.

All Sensors' E1BD Package


A protective parylene coating is an option for moisture/harsh media protection in the DLVR, DLHR and DLLR Series E1BD package.

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